🤖 AI Summary
This work addresses the challenge of modeling data retention in 3D ferroelectric vertical NAND, where charge detrapping and ferroelectric depolarization interact in a coupled manner, rendering traditional TCAD simulations computationally prohibitive for large-scale design optimization. To overcome this limitation, the study introduces, for the first time, the physics-informed neural operator (PINO) framework into ferroelectric memory modeling. A deep learning surrogate model is developed that embeds physical constraints and is trained on TCAD-generated data to accurately predict FeFET threshold voltage drift and data retention behavior. The proposed approach achieves over four orders of magnitude acceleration in simulation speed for individual devices while preserving physical accuracy comparable to TCAD, thereby offering a high-fidelity, highly efficient analysis tool for the design of 3D ferroelectric memory architectures.
📝 Abstract
Ferroelectric field-effect transistors (FeFET)-based vertical NAND (Fe-VNAND) has emerged as a promising candidate to overcome z-scaling limitations with lower programming voltages. However, the data retention of 3D Fe-VNAND is hindered by the complex interaction between charge detrapping and ferroelectric depolarization. Developing optimized device designs requires exploring an extensive parameter space, but the high computational cost of conventional Technology Computer-Aided Design (TCAD) tools makes such wide-scale optimization impractical. To overcome these simulation barriers, we present a Physics-Informed Neural Operator (PINO)-based AI surrogate model designed for high-efficiency prediction of threshold voltage (Vth) shifts and retention behavior. By embedding fundamental physical principles into the learning architecture, our PINO framework achieves a speedup exceeding 10000x compared to TCAD while maintaining physical accuracy. This study demonstrates the model's effectiveness on a single FeFET configuration, serving as a pathway toward modeling the retention loss mechanisms.