Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

2026-09-10

AI Summary

"This study addresses the challenges in data comparison and reutilization within the field of materials science, specifically due to the inconsistent reporting formats of atomic layer deposition (ALD) and atomic layer etching (ALE) experiments and simulations. The work proposes and expertly reviews four JSON schemas based on the QUDT standard, designed to standardize the description of materials, process conditions, configurations, and results in ALD/ALE processes, ensuring data consistency and interoperability. The innovation lies in the development and application of these specialized JSON schemas, which, through the use of a schema-miner toolset, enable effective extraction and structured representation of literature content, thereby promoting knowledge sharing. Additionally, the study provides a comparative analysis of the schemas and publishes related structured records on the ORKG platform, demonstrating their potential for guiding information extraction tasks."

Abstract

Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Curated with schema-miner and grounded in QUDT using schema-miner pro, the schemas structure materials, process conditions, configurations , and measured or predicted results. We compare their scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured records through ORKG templates.

Problem

• Atomic Layer Deposition
• Atomic Layer Etching
• Materials Science

Innovation

• JSON Schemas
• Atomic Layer Deposition (ALD)
• Atomic Layer Etching (ALE)
• Schema-Miner
• QUDT