Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science
"This study addresses the challenges in data comparison and reutilization within the field of materials science, specifically due to the inconsistent reporting formats of atomic layer deposition (ALD) and atomic layer etching (ALE) experiments and simulations. The work proposes and expertly reviews four JSON schemas based on the QUDT standard, designed to standardize the description of materials, process conditions, configurations, and results in ALD/ALE processes, ensuring data consistency and interoperability. The innovation lies in the development and application of these specialized JSON schemas, which, through the use of a schema-miner toolset, enable effective extraction and structured representation of literature content, thereby promoting knowledge sharing. Additionally, the study provides a comparative analysis of the schemas and publishes related structured records on the ORKG platform, demonstrating their potential for guiding information extraction tasks."